Low-Insertion-Loss and Power-Efficient 32 × 32 Silicon Photonics Switch With Extremely High-Δ Silica PLC Connector
Journal of Lightwave Technology, pp. 116-122, 2019.
We fabricate a 32 × 32 silicon photonics switch on a 300-mm silicon-on-insulator wafer by using our complementary metal-oxide-semiconductor pilot line equipped with an immersion ArF scanner and demonstrate an average fiber-to-fiber insertion loss of 10.8 dB with a standard deviation of 0.54 dB, and on-chip electric power consumption of 1....More
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