Effect of porous silicon substrate on structural, mechanical and optical properties of MOCVD and ALD ruthenium oxide nanolayers

Ievgen Brytavskyi,Kristína Hušeková,Valerii Myndrul,Mykola Pavlenko,Emerson Coy,Karol Zaleski,Dagmar Gregušová,Luis Yate,Valentyn Smyntyna,Igor Iatsunskyi

Applied Surface Science（2019）

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摘要

•RuO2 thin layers on porous Si substrate were synthesized using MOCVD and ALD.•Relation between structural, mechanical and optical properties of RuO2/PSi were established.•Energy gap values of RuO2 are determined by structural defects, mechanical stresses and quantum confinement.

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关键词

Porous silicon,Ruthenium oxide,ALD,MOCVD

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