Wafer-scale MOVPE growth and characterization of highly ordered h-BN on patterned sapphire substrates

Journal of Crystal Growth(2019)

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摘要
•h-BN were grown on sub-micron size dome patterned sapphire substrates.•Wrinkled morphology of layered h-BN was obtained on c-plane sapphire.•On the domes, h-BN were different demonstrating anisotropy.•TEM confirmed h-BN is layered and continuous with turbostratic islands on domes.•320 nm peak intensity increase confirms the TEM observations.
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关键词
2D materials,h-BN,Patterned sapphire substrates,MOVPE
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