Design And Fabrication Of Piezoresistive Graphene/H-Bn Heterostructure Pressure Sensor

High precision pressure sensor is a common sensing device for condition monitoring and fault prediction. 2-D materials such as graphene and boron nitride have excellent mechanical property, which provide an effective technical approach for developing high precision pressure sensors. However, the design of current suspended piezoresistive graphene/h-BN heterostructure pressure sensor is mainly based on experience and lacks sensitivity model guidance when designing the structure size. On the basis of modeling and simulation results of membrane deformation, the relationship among membrane resistance, size and ambient pressure is derived. The sensitivity model of circular membrane is established, based on which the structure size of the sensor is designed. The graphene/h-BN heterostructure is obtained via wet transfer technology with a series of membrane diameters fabricated. The test results show that the proposed sensitivity model and manufacturing process are effective and reasonable.