Modification of Zn ion hot implanted Si by swift Xe ion irradiation

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms（2019）

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摘要

HRTEM images of Zn implanted Si after Xe ion irradiation with fluence of 7.5 × 1014/cm2.

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关键词

Si,Zn,Hot implantation,Nanoparticles,Swift Xe ion irradiation,Irradiation-induced defects

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