Thermally stable heavily boron-doped diamond resistors fabricated via selective area growth by hot-filament chemical vapor deposition

Shin-ichiro Suzuki,Shinya Ohmagari,Hiroyuki Kawashima,Takeyasu Saito,Hitoshi Umezawa,Daisuke Takeuchi

Thin Solid Films（2019）

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摘要

•Diamond heavily B-doped (p+) film resistors were fabricated via selective area growth•By controlling the width and length of p+ films, resistance could be well controlled•Thermally stable with small temperature coefficient was realized•Resistance was unchanged under X-ray irradiation of 500 kGy

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