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Raman Scattering Investigation of Strain Evolution during Surface-Activated Bonding of GaN

Ryo Tanabe, T. Onodera, Masahiro Uemukai, Toshiki Hikosaka, Shinya Nunoue,Kanako Shojiki,Hideto Miyake,Maki Kushimoto, Heajeong Cheong,Y. Honda,Hiroshi Amano,Ryuji Katayama

The Japan Society of Applied Physics（2019）

引用 23|浏览15
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raman scattering investigation,gan,bonding,surface-activated
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