Transformation of Ramped Current Stress VBD to Constant Voltage Stress TDDB TBD
2019 IEEE International Reliability Physics Symposium (IRPS)(2019)
摘要
We have carried out an investigation for equivalence among three different stress methods: ramped voltage stress (RVS) method, ramped current stress (RCS) method, and constant voltage stress (CVS) method. Unlike the conventional RVS test with a constant ramp rate, we show the change of response voltage in RCS tests can be regarded as effectively a variable ramp rate. A data-analysis methodology along with a generalized Berman summation model [1] is presented to transform voltage-to-breakdown (V
BD
) of RCS to Time-to-breakdown (T
BD
) of CVS TDDB domain. We demonstrate the good agreement of directly T
BD
data and converted T
BD
data among three methods and thus establishes the fundamental equivalence of these different methods.
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