Mechanically Modulated Microwave Circulator

Mustafa Mert Torunbalci,Suresh Sridaran,Richard C. Ruby,Sunil A. Bhave

2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)（2019）

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摘要

This work presents a differential FBAR circulator that uses the bending mode to mechanically modulate the FBAR mode without any varactors or switches. The differential FBAR circulator achieves a 61.5 dB isolation (IX) with an insertion loss (IL) of 1.8 dB at 2.68 GHz, demonstrating the first MEMS-only circulator, The isolation bandwidth at -25 dB is 4.7 MHz and power handling of the circulator is limited by the FBARs to +34 dBm.

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关键词

FBAR, microwave circulator, mechanical modulation

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