A Comparison of Metal Adhesion Layers for Au Films in Thermo-Plasmonic Applications

William M. Abbott,Christopher P. Murray,Sorcha Ni Lochlainn,Frank Bello,Chuan Zhong,Christopher Smith,Eoin K. McCarthy,Clive Downing,Dermot Daly,Amanda K. Petford-Long,Cormac McGuinness, Igor Igorovich Chunin,John F. Donegan,David McCloskey

Conference on Lasers and Electro-Optics（2019）

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摘要

The dewetting resistance of Au 50 nm films fabricated atop Ti/Ta/W/Cr/Al adhesion layers (0.5-5 nm) was investigated. Results show sub-nanometer Ta has superior stability under thermal stress, while W & Ti show best plasmonic response.

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关键词

de-wetting,thin-film,plasmonic,HAMR,adhesion

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