Enhanced Photo Response At Two-Micron-Wavelength Using Gesn/Ge Multiple-Quantum-Well Waveguide

Shengqiang Xu,Yi-Chiau Huang,Saeid Masudy-Panah,Xiao Gong,Yee-Chia Yeo

2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2019）

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摘要

GeSn multiple-quantum-well rib waveguide on Si substrate was fabricated with vertical p-i-n photodiode structure and was characterized at two-micron-wavelength. Enhanced external photo response was achieved as compared to surface-illuminated counterparts, thanks to the waveguide scheme. (c) 2019 The Author(s)

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关键词

gesn/ge,waveguide,two-micron-wavelength,multiple-quantum-well

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