Hydrogen Plasma Treatment Of Mos2 With Graphene Protection

Anishkumar Soman,Robert A. Burke,Qui Li,Michael Valentin,Eugene Zakar,Ugochukwu Nsofor,Steven Hegedus,Ujjwal K. Das,Jianping Shi,Yanfeng Zhang,Tingyi Gu

2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2019）

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摘要

Hydrogen plasma treatment can create defects such as sulfur vacancies in single layer MoS2. A single layer graphene's protection can effectively reduce the defects formation as confirmed by Raman spectroscopy. (c) 2019 The Author(s).

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