Local and anisotropic strain in AlN film on sapphire observed by Raman scattering spectroscopy

Yusuke Hayashi
Yusuke Hayashi
Kenjiro Uesugi
Kenjiro Uesugi

JAPANESE JOURNAL OF APPLIED PHYSICS, 2019.

Cited by: 0|Views1

Abstract:

Strain states in face-to-face-annealed sputter-deposited c-plane AlN (FFA-sp-AlN) films on c-and a-plane sapphire substrates were evaluated. As a result, an existence of anisotropic strain in the c-plane FFA-sp-AlN film on a-plane sapphire was ascertained by X-ray diffraction reciprocal space maps. Consequently, the peak splitting of pola...More

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