Ring Resonator Based Ultrasound Detection In A Zero-Change Advanced Cmos-Soi Process

Panagiotis Zarkos,Olivia Hsu,Vladimir Stojanović

2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2019）

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摘要

Optical ultrasound detection using microring resonators (MRRs) in a zero-change 45nm CMOS-SOI electronic-photonic platform with high intrinsic sensitivity of 39.6 fm/kPa and frequency response of 6MHz is reported. (c) 2019 The Author(s)

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关键词

optical ultrasound detection,microring resonators,MRR,ring resonator based ultrasound detection,zero-change advanced CMOS-SOI electronic-photonic platform,size 45.0 nm,frequency 6.0 MHz,Si

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