Fabrication of coherent γ-Al2O3/Ga2O3 superlattices on MgAl2O4 substrates

APPLIED PHYSICS EXPRESS, pp. 0655032019.

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Abstract:

We succeeded in fabricating 10-period coherent gamma-Al2O3/Ga2O3 superlattices (SLs) on MgAl2O4 substrates by molecular beam epitaxy. By varying each layer thickness, we tuned the average Al composition (x(ave)) of the coherent SLs from 0.20 to 0.85, and obtained nearly-lattice-matched SLs to the substrate at x(ave) similar to 0.5. The la...More

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