Passivation improvement of nitric acid oxide by ozone post-treatment for tunnel oxide passivated contacts silicon solar cells
Applied Surface Science(2019)
摘要
We demonstrate the passivation improvement of tunnel oxide formed by nitric acid oxidation and followed by ozone post-treatment. A tunnel oxide passivated contacts (TOPCon) structure was fabricated through polysilicon crystallization using POCl3 diffusion on a wet-chemical oxide that was grown by nitric acid solution and underwent ozone post-treatment. To improve the quality of nitric acid oxide used as a tunnel oxide of TOPCon, ozone post-treatment was performed at 400 °C. Ozone post-treatment of wet-chemical oxide improved the passivation performance owing to the reduction of sub-oxide in silicon oxide. Excellent passivation was achieved for the n-type passivated contacts with implied open-circuit voltage of 740 mV after crystallization of amorphous silicon using POCl3 diffusion at 875 °C.
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关键词
Ozone oxide,Tunnel oxide,Passivation,Diffusion furnace,Si solar cell,Sub-oxide
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