Photocatalytic Performance and Hydrophilicity of TiO² Sputtered with Tungsten Vanadium Alloy.

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY(2020)

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摘要
In this study, TiWVOx/TiO2 thin-films were fabricated using a bipolar pulsed magnetron sputtering technique and were characterized. The results obtained using the X-ray diffraction analysis confirmed the anatase phase structure with a highly oriented TiO2 (101) plane. The surface images obtained through scanning electron microscopy revealed the uniform distribution of pebble-like or cell-like clusters with no noticeable crack formation. In this study, an increasing WV alloy pulse power was positively associated with increasing proportions of WOx and VOx in the films. The TiO2 with WV alloy sputtered at a power of 50 W was found to be more hydrophilic than TiO2 with WV alloy sputtered at 200 W, thereby exhibiting enhanced photocatalytic activity.
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关键词
Bipolar Pulsed Magnetron Sputtering,Highly Oriented,Hydrophilic,Photocatalytic Activity
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