Electronic Calibration of One-Port Networks at Submillimeter Wavelengths Using Schottky Diodes As On-Wafer Standards

An approach for one port on-wafer electronic calibration at submillimeter wavelengths is described. Quasivertical GaAs Schottky diodes integrated onto silicon serve as the electronic calibration standard. The S-parameters of the diode standards are characterized over the WM-570 (325-500 GHz) band as a function of bias and subsequently used as the standard for one-port calibration. Comparisons of the error coefficients derived using the diode standard are shown to be in good agreement with those obtained from a conventional set of standards consisting of coplanar delayed short circuits.