Micromechanical Systems: Atomic Layer Deposition for Membranes, Metamaterials, and Mechanisms (Adv. Mater. 29/2019)Kyle J. Dorsey,Tanner G. Pearson,Edward Esposito, Sierra Russell,Baris Bircan,Yimo Han,Marc Z. Miskin,David A. Muller,Itai Cohen,Paul L. McEuenAdvanced Materials(2019)引用 0|浏览10暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络