Integrated piezoelectric micromechanical vibration platform for six degree of freedom motion

Piezoelectric micromechanical actuators are featured with a low driving voltage, fast response and large-range output, which make them desirable for applications of long-term drift error self-calibration in microelectromechanical systems (MEMS) inertial measurement units. A micromechanical vibration platform supported by four folded beams and excited by 32 partitioned electrodes based on PZT film is presented in this paper. PZT-silicon on insulator based wafer-level MEMS process and packaging technique are conducted in the manufacture and integration for the micro vibration platform. The six-degree-of-freedom (6 DOF) motion of the micro vibration platform is experimentally verified. In addition, the motion behavior control, damping characteristics and fatigue characteristics are analyzed. The 6 DOF micro vibration platform has a stable capability of large-range dynamic output.