Influence of NH 3 partial pressure on homoepitaxial growth of AlN by HVPENao Takekawa,Daichi Saito, Yudai Shimizu,Ken Goto,Toru Nagashima, Reo Yamamoto,Yoshinao KumagaiThe Japan Society of Applied Physics(2019)引用 23|浏览5暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要