Characteristics of Coplanar Waveguide of Small Cross Section on BCB with Coplanar Ground to Conductor-Backed Plane Interconnection

Conductor-backed coplanar waveguide on 30-μm-thick BCB polymer is fabricated. In order to eliminate unwanted propagation modes for these lines designed for frequencies up to 1 THz, electroplated vias interconnect each coplanar ground to the backed conductor. Transmission line properties are extracted here up to 67 GHz, showing a characteristic impedance of about 50 Ω, but with high conduction losses for this frequency range due to the thin metal layer used. Thru-reflect-line correction and a de-embedding with electrical circuit of accesses are applied to extract line properties. The comparison with a coplanar waveguide model leads to a relative permittivity of 2.676 for the BCB in this low-frequency range.