Multi-scale modeling of gas-phase reactions in metal-organic chemical vapor deposition growth of WSe2
Journal of Crystal Growth(2019)
摘要
•Multi-scale modeling for the gas-phase chemical kinetics of MOCVD is performed.•Gas-phase temperature and species distributions predicted in MOCVD chamber.•Predictions capture the measured trend of crystal growth with temperature variation.•Multi-scale modeling extendable to other CVD chemistries.
更多查看译文
关键词
Density Functional Theory,ReaxFF molecular dynamics,Computational Fluid Dynamics,MOCVD,Chemical Kinetics,WSe2
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络