Nano-porous coatings for gas retention studies

One way to produce coatings with high gas retaining capability is to manipulate their structure towards a nano-porous one. Combined Magnetron Sputtering and Ion Implantation (CMSII) technique was used to produce pores of 1-10 nm in tungsten layers of about 1 mu m in thickness. STEM, EDX, RBS, TDS and GDOES techniques were used for analyses of these layers. By heating the layer at 950 degrees C the pores size increased up to 30 nm. The total amount of Ar retained in these layers was 3.9. 10(20) atoms/m(2) while in compact W coating of the same thickness only 2.7. 10(19) atoms/m(2) it was found.