Mid-Infrared Aluminum Nitride on Insulator (AlNOI) Platform

Kah Wee Ang,Bowei Dong,Dim-Lee Kwong,Chengkuo Lee,Patrick Guo-Qiang Lo,Xianshu Luo

international conference on group iv photonics（2019）

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摘要

We report mid-infrared aluminum nitride on insulator (AlNOI) platform. The material properties of the AlNOI platform are studied by Raman, FTIR, and XRD spectroscopy. Propagation loss, bending loss, taper coupling efficiency are characterized by single-mode waveguide devices. This platform can complement silicon photonics in the mid-infrared.

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关键词

mid-infrared,aluminum nitride,waveguide devices

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