Ion Implantation and Electrical Annealing for Trimming Silicon MZIs and Facilitating One-Time Programmable Photonic Circuits
International Conference on Group IV Photonics（2019）
Abstract
We use Ge ion implantation and electrical annealing, via TiN micro-heater, to trim silicon MZIs. The results show the possibility for switching the output power from the drop port to through port permanently, locally and rapidly.
MoreTranslated text
Key words
Ion implantation,Switching,Electrical Annealing,Mach-Zehnder Interferometer,silicon photonics
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined