AI帮你理解科学

AI 生成解读视频

AI抽取解析论文重点内容自动生成视频


pub
生成解读视频

AI 溯源

AI解析本论文相关学术脉络


Master Reading Tree
生成 溯源树

DSA guiding template assignment with multiple redundant via and dummy via insertion

Integration, (2020): 32-42

被引用0|浏览19
EI

摘要

As an emerging manufacture technology, block copolymer directed self-assembly (DSA) is promising for via layer fabrication. Meanwhile, redundant via insertion is considered as an essential step for yield improvement. For better reliability and manufacturability, in this paper, we first concurrently consider DSA guiding template cost assig...更多

代码

数据

您的评分 :
0

 

标签
评论
小科