An Ultra-High Resolution Resonant Mems Accelerometer
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)(2019)
摘要
This paper reports initial results on the implementation of a high-resolution resonant MEMS accelerometer with a noise floor of 17.8ng/root Hz and a bias stability of 17.5ng with a differential frequency readout configuration. The differential readout scheme provides for rejection of common mode environmental effects to first order. This prototype sensor demonstrates the best bias stability and noise floor of all MEMS resonant accelerometer configurations reported till date.
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关键词
common mode environmental effect rejection,ultrahigh resolution resonant MEMS accelerometer,differential frequency readout configuration
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