Hybrid multilayered films comprising organic monolayers and inorganic nanolayers for excellent flexible encapsulation films

•Hybrid superlattice films composed of 4MP and Al2O3 were developed for thin film encapsulation.•The 4MP/Al2O3 superlattices achieved an ultralow water vapor transmission rate.•Organic layers inhibit pinhole propagation through which water permeation is restricted.•Both organic- and inorganic-layers play a role for the resistance to mechanical strain.•Thickness and thickness ratio of each organic and inorganic layer should be modulated.