Enhanced dielectric performance of BaxSr(1-x)TiO3 films prepared by the direct current micro-arc oxidation in the presence of ethylenediamine tetraacetic acid

Min Wang,Xi Zuo,Wenfang Li,Genghua Cao, An Xiang

Thin Solid Films（2020）

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摘要

•Ethylenediamine tetraacetic acid has an inhibitory effect on the growth of films.•Best compactness and smoothness are observed.•Capacitance is significantly increased.•Residual polarization strength is 3.4 μC/cm2.

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关键词

Micro-arc oxidation,Strontium barium titanate,Ethylenediamine tetraacetic acid,Micro-structure,Dielectric properties

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