Effect of substrate temperature on F and Al co-doped ZnO films deposited by radio frequency magnetron sputtering

Yanfeng Wang,Jianmin Song,Jie Zhang,Guoxi Zheng,Xiaochen Duan,Xicheng Xie,Bing Han,Xudong Meng,Fu Yang,Guangcai Wang,Ying Zhao,Junjie Li

Solar Energy（2019）

引用 15|浏览3

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摘要

•Good performance of fluorine and aluminum co-doped ZnO (FAZO) films has been fabricated on glass substrates.•Good broadband spectral transmittance was obtained than referenced AZO films.•Perovskite solar cells employing the optimal FAZO film shows higher conversion efficiency than AZO films used.

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关键词

Transparent conductive films,F and Al co-doping ZnO film,Magnetron sputtering,Broadband spectral transmittance,Thin film solar cells

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