$\beta $
-Ga
2
O
3
thin-channel MOSFETs were evaluated using both dc and pulsed
${I}$
–
${V}$
measurements. The reported pulsed
${I}$
–
${V}$
technique was used to study self-heating effects in the MOSFET channel. The device was analyzed over a large temperature range of 23 °C–200 °C. A relationship between dissipated power and channel temperature was established, and it was found that the MOSFET channel was heating up to 208 °C when dissipating 2.5 W/mm of power. The thermal resistance of the channel was found to be 73 °C-mm/W. The results are supported with the experimental Raman nanothermography and thermal simulations and are in reasonable agreement with pulsed
${I}$
–
${V}$
findings. The high thermal resistance underpins the importance of optimizing thermal management in future Ga
2
O
3
devices.
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关键词
Temperature measurement,MOSFET,Logic gates,Pulse measurements,Voltage measurement,Gallium,Electrical resistance measurement