Influence of thin MOCVD-grown GaN layer on underlying AlN template

Masatomo Sumiya,Kiyotaka Fukuda, Shuhei Yasiro,Tohru Honda

Journal of Crystal Growth（2020）

引用 10|浏览20

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摘要

•Direct growth of GaN on AlN template/sapphire.•Complimentary variation of AlN template with increase of GaN growth time.•Comparison of GaN growth between on AlN template and on sapphire substrate.•Advantages of AlN template for GaN film.

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关键词

A3 Metalorganic chemical vapor deposition,B1 Nitrides,B2 Semiconducting III-V materials

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