Monolithic Micro LED/Metal Oxide Nanowire Gas Sensor with Microwatt-Level Power Consumption.
ACS sensors(2020)
摘要
High performance, monolithic photoactivated gas sensors based on the integration of gas-sensitive semiconductor metal oxide (SMO) nanowires on micro light emitting diode (μLED) are introduced. The μLEDs showed improved irradiance and energy conversion efficiency (i.e. external quantum efficiency, EQE), as the size of LEDs was reduced from 200 × 200 μm (irradiance of 46.5 W/cm2 and EQE of 4 %) to 30 × 30 μm (irradiance of 822.4 W/cm2 and EQE of 9 %). Gas-sensitive zinc oxide (ZnO) nanowires were directly synthesized on top of the μLED through a hydrothermal reac-tion. The direct contact between the sensing component and μLED sensor platform leads to high light coupling efficiency, minimizing power consumption of the sensor. Furthermore, the sensing performance (i.e. sensitivity) at optimal operating power were improved as the LED size was reduced. The smallest fabricated gas sensor (active area = 30 × 30 μm) showed excellent NO sensitivity (ΔR / R = 605 % to 1 ppm NO) at the optimal operating power (~184 μW). In addition, the sensor showed low limit of detection (~ 14.9 ppb) and robustness to high humidity conditions, which demonstrate its potential for practical applications in mobile internet of things (IoT) devices.
更多查看译文
关键词
gas sensor,micro LED,photoactivation,metal oxide nanowire,low power sensor
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络