Commensurability-driven Orientation Control during Block Copolymer Directed Self-assembly.

In this study, the orientation of block copolymer patterns in topographical templates is controlled using a simple template design rule. The orientation of the pattern is selected by using a template with one commensurate dimension and one incommensurate dimension. An array of binary states of a block copolymer pattern can be programmed into a desired layout by tuning of the template wall thickness.