Timing-Aware Fill Insertions with Design-Rule and Density Constraints
ICCAD, pp. 1-8, 2019.
Metal fill insertion has become an essential step to reduce dielectric thickness variation and improve pattern uniformity, which is important in mitigating process variations, thereby achieving better manufacturing yield. However, metal fills could induce coupling capacitance, which is not often considered in existing works that typically...More
Full Text (Upload PDF)
PPT (Upload PPT)