Timing-Aware Fill Insertions with Design-Rule and Density Constraints

Tingshen Lan
Tingshen Lan
Xingquan Li
Xingquan Li
Jun Yu
Jun Yu
Lei He
Lei He
Senhua Dong
Senhua Dong

ICCAD, pp. 1-8, 2019.

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Abstract:

Metal fill insertion has become an essential step to reduce dielectric thickness variation and improve pattern uniformity, which is important in mitigating process variations, thereby achieving better manufacturing yield. However, metal fills could induce coupling capacitance, which is not often considered in existing works that typically...More

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