Graph- and ILP-Based Cut Redistribution for Two-Dimensional Directed Self-Assembly

Zhan-Ling Wang
Zhan-Ling Wang

ICCAD, pp. 1-7, 2019.

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Abstract:

Two-dimensional (2D) directed self-assembly (DSA) is a promising technology for sub-5nm process, which forms patterns through combinations of oriented double posts. In 2D DSA, line-end cuts are employed to fabricate 2D patterns to derive desired layouts, and cut redistribution is applied to eliminate cut spacing violations. In this paper,...More

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