Graph- and ILP-Based Cut Redistribution for Two-Dimensional Directed Self-Assembly
ICCAD, pp. 1-7, 2019.
Two-dimensional (2D) directed self-assembly (DSA) is a promising technology for sub-5nm process, which forms patterns through combinations of oriented double posts. In 2D DSA, line-end cuts are employed to fabricate 2D patterns to derive desired layouts, and cut redistribution is applied to eliminate cut spacing violations. In this paper,...More
Full Text (Upload PDF)
PPT (Upload PPT)