Development of MEMS microsensors, aiming at the application in the study of muscle fatigue in vivo
2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)(2019)
摘要
The following topics are dealt with: elemental semiconductors; MOSFET; silicon; silicon-on-insulator; solar cells; nanowires; III-V semiconductors; semiconductor growth; gallium arsenide; silicon compounds.
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关键词
MEA probe,MEMS microneedle,pH sensor,Muscle fatigue,Microelectrode,Cyclic voltammeter
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