Bulk nanocrystalline graphite thin films for piezorezistive sensing applications

2019 International Semiconductor Conference (CAS)(2019)

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摘要
Bulk nanocrystalline graphite has been investigated as a possible candidate for piezoresistive sensors. Several thin films have been grown by PECVD and investigated through various techniques: Raman spectroscopy, electrical characterization, AFM, profilometry and spectroscopic ellipsometry. After a careful analysis of our findings we have weighted the use of the material as a piezoresistive sensor and made a goal for future research.
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关键词
PECVD,nanocrystalline,piezoresistivity.
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