2d Lspr Multi Gas Sensor Array With 4-Segmented Subpixel Using Au/Ag Core Shell Structure

2019 IEEE SENSORS(2019)

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摘要
LSPR (Localized Surface Plasmon Resonance) based 2D (2 Dimensional) gas imaging sensor system which can capture spatial distribution of each constituent of mixed gas have been developed. The gas image sensor detects the gas promoted optical changes occurred on the LSPR substrate by CCD camera. Basically, LSPR gas sensor does not have a molecular selectivity, then the identification of gas species is difficult. To overcome the disadvantage, pixelated LSPR substrate based on Au/Ag core-shell structure which has different gas response properties is fabricated by photo-induced metal growth by mask-less exposure system using a commercial video projector.
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关键词
LSPR, gas sensor, identification of gas species, mask-less exposure system, Au/Ag core-shell structure
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