Suppression of dislocation-induced spiral hillocks in MOVPE-grown AlGaN on face-to-face annealed sputter-deposited AlN template

Kenjiro Uesugi
Kenjiro Uesugi
Yuta Tezen
Yuta Tezen
Yusuke Hayashi
Yusuke Hayashi

Applied Physics Letters, pp. 0621012020.

Cited by: 0|Views0

Abstract:

AlGaN films were grown on face-to-face annealed sputter-deposited AlN/sapphire (FFA Sp-AlN) templates via metalorganic vapor phase epitaxy (MOVPE), and the growth behavior of the AlGaN films was investigated. The sapphire substrates with small off-cut exhibited poor surface flatness of AlGaN grown on the FFA Sp-AlN templates owing to the ...More

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