Comparative study of BeMgZnO/ZnO heterostructures on c-sapphire and GaN by molecular beam epitaxy

Growth of ZnO directly on c-plane sapphire, with a large in-plane lattice mismatch of 18%, is relatively well understood for O-polar variety. However, the two-dimensional (2D) growth of Zn-polar ZnO on c-sapphire, needed for 2D electron gas formation, with low background electron density is in its infancy. While Zn-polar ZnO can be grown on GaN with the resulting small lattice mismatch (1.8%), the parallel conduction through GaN (bulk and/or surface) in fabricated BeMgZnO/ZnO heterostructure field effect transistors (HFETs) limits its utility for the time being. In this contribution, the authors report on the growth of high-quality Zn-polar BeMgZnO/ZnO HFET structures directly on sapphire substrates, in an effort to avoid the aforementioned parallel conduction, by employing an MgO and low-temperature ZnO buffer stack. The residual 2D equivalent concentration in the HFET structure on GaN is similar to 2x10(12)cm(-2), which is detrimental, while highly resistive (>100 Omega.cm) Zn-polar ZnO layers with smooth surfaces on c-sapphire have been obtained via controlling the buffer stack growth conditions, which is vital to the realization of HFET device structures. Compared with the highest room temperature electron mobility of similar to 250cm(2)/Vs in BeMgZnO/ZnO HFETs on GaN templates, a slightly lower electron mobility of similar to 220cm(2)/Vs was achieved on c-sapphire due to a somewhat lower overall crystalline quality. Published under license by AVS.