High quality AlN film on sapphire prepared by two step sputtering-annealing

Ding Wang
Ding Wang
Kenjiro Uesugi
Kenjiro Uesugi
Shiyu Xiao
Shiyu Xiao
Yuta Tezen
Yuta Tezen
Kenji Norimatsu
Kenji Norimatsu

The Japan Society of Applied Physics, 2020.

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