High quality AlN film on sapphire prepared by two step sputtering-annealingDing Wang,Kenjiro Uesugi,Shiyu Xiao, Yuta Tezen,Kenji Norimatsu,Kanako Shojiki,Shigeyuki Kuboya,Hideto MiyakeThe Japan Society of Applied Physics(2020)引用 22|浏览19暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要