CL studies of AlN films grown on high-temperature-annealed sputtered AlN (1)Kohei Shima, Taizo Nakasu,Kanako Shojiki,Kenjiro Uesugi,Kazunobu Kojima,Akira Uedono,Hideto Miyake,Shigefusa ChichibuThe Japan Society of Applied Physics(2020)引用 23|浏览18暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要