Low temperature synthesis of transparent conductive boron doped diamond films for optoelectronic applications: Role of hydrogen on the electrical properties

P. Ashcheulov,A. Taylor,Z. Vlčková Živcová,P. Hubík,J. Honolka,M. Vondráček, M. Remzová,J. Kopeček,L. Klimša,J. Lorinčik,M. Davydova,Z. Remeš,M. Kohout,A.M. Beltran,V. Mortet

Applied Materials Today（2020）

引用 13|浏览160

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摘要

•Synthesis of nanocrystalline boron-doped diamond (BDD) films at 250 °C via CVD method.•Low temperature (250 °C) fabrication of transparent conductive BDD/Ti-grid electrodes.•Temperature of BDD synthesis affects electrical properties of diamond electrodes.•Formation of electrically neutral boron-hydrogen complexes at low temperatures.

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关键词

Transparent conductive electrode,Boron doped diamond,BDD,Electrical conductivity,Thin film coating

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