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Integrated Silicon Nitride Horizontal Long Period Grating for Refractometric Gas Sensing applications

2020 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)(2020)

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摘要
We designed an integrated long period grating based on the horizontal periodic tapering of a silicon nitride channel waveguide. The structure is studied for gas sensing applications, using Styrene AcryloNitrile as sensitive layer. Simulation results from the proposed architecture show a high sensitivity beyond 1700 nm/RIU using a wavelength interrogation method centered at 1550 nm for a 20pm large and 300pm long structure.
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关键词
Integrated photonics,gas sensor,modeling,long period grating,coupled local mode theory
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