High-Resolution Low-Latency Capacitive Displacement Sensor
semanticscholar(2009)
摘要
This paper addresses the challenges related to the design of a high-resolution, low-latency capacitive displacement sensor. An auto-alignment mechanism of the sensor head is proposed which relaxes the resolution requirement of the readout circuit. Different interfacing principles are investigated and analyzed, and the advantage of using a switched-capacitor readout topology for a specific application is made clear.
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