Broadband High-Efficiency Grating Couplers for Perfectly Vertical Fiber-to-Chip Coupling Enhanced by Fabry-Perot-like Cavity

Chuantong Cheng
Chuantong Cheng
Bing Bai
Bing Bai
Tianxi Gao
Tianxi Gao
Xiaobo Xu
Xiaobo Xu
Wenping Gu
Wenping Gu

MICROMACHINES, pp. 8592020.

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Abstract:

We propose a broadband high-efficiency grating coupler for perfectly vertical fiber-to-chip coupling. The up-reflection is reduced, hence enhanced coupling efficiency is achieved with the help of a Fabry-Perot-like cavity composed of a silicon nitride reflector and the grating itself. With the theory of the Fabry-Perot cavity, the dimensi...More

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