0.16 mu m BCD Single-Photon Avalanche Diode with 30 ps timing jitter, high detection efficiency and low noise
ADVANCED PHOTON COUNTING TECHNIQUES XII(2018)
摘要
CMOS SPADs are nowadays an established imaging technology for applications requiring single-photon sensitivity in a compact form-factor (e.g. three-dimensional LIDAR imaging and fluorescence lifetime FLIM microscopy). However, we aimed at further enhance overall SPAD performances, by exploiting smart power technologies, such as the BCD (Bipolar-CMOS-DMOS) one. We achieved the present state-of-the-art SPADs fabricated in the 0.16 mu m BCD technology by STMicroelectronics, attaining >60% photon detection efficiency at 500 nm, dark count rate density <0.2 cps/mu m(2), and less than 30 ps FWHM timing jitter.
更多查看译文
关键词
Photon counting,photon timing,single-photon avalanche diodes (SPADs),time-correlated single-photon counting (TCSPC),LIDAR,Time-of-Flight (TOF),3-D ranging,FLIM
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络