Characterization of nanogenerators based on S-doped zinc oxide nanorod arrays

Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems(2020)

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摘要
Nanogenerators (NGs) synthesized with sulfur (S) doped zinc oxide (ZnO) nanorods (NRs) by a hydrothermal method were characterized for their performances in this study. The NG formation steps consist of (1) growing the S-doped ZnO NRs on an indium-tin-oxide (ITO) glass substrate, (2) employing an ITO etching paste to create the electrode pattern, and (3) depositing an electrode of aluminum (Al) film on the ITO glass substrate by a radio-frequency magnetron sputtering technique for the final NG assembly. As found, the ZnO NRs doped with 5 at.% S exhibit the best efficiency among all S-doped ZnO NRs, with the optimal operational outputs of 150 mV, 0.16 μA, and 24 nW, respectively.
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